The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.

摘悬臂梁的物理性参数尤其是弹性系数对MEMS中微器件的性有的影响。

MEMS will be one of the most important realm of science in 21th century,and micropower which is a branch of MEMS directly relates to development of MEMS in some applied realm.

微机电系统(MEMS)将是21世纪最的研究领域之一,而微源器件是MEMS其中一个分支,其发展直接关系到MEMS在某些领域中的应用。