The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.
摘要悬臂梁的物理性能参数尤
弹性系数对MEMS
件的性能有着重要的影响。
型机电系统The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.
摘要悬臂梁的物理性能参数尤弹性系数对MEMS件的性能有着重要的影响。
MEMS will be one of the most important realm of science in 21th century,and micropower which is a branch of MEMS directly relates to development of MEMS in some applied realm.
机电系统(MEMS)将21世纪最重要的研究领域之一,而能源件MEMS一个重要分支,发展直接关系到MEMS在某些领域的应用。
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