词An error compensation control method which can improve contour tracing accuracy of aspherical surface ultraprecise machine is introduced.
介绍了一种可提
非球曲面超精密加工机床的轮廓跟踪精度的误差补偿控制方法。
An error compensation control method which can improve contour tracing accuracy of aspherical surface ultraprecise machine is introduced.
介绍了一种可提非球曲面超精密加工机床的轮廓跟踪精度的误差补偿控制方法。
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